The Uppsala group had been also in a position to undertake deposition of copper metallic by ALD employing copper(I) chloride.23 In this case, the copper steel was deposited on tantalum steel foils, making use of an evaporation temperature of 350°C along with a deposition temperature range of 360°C– 410°C. The https://aldtechniques03692.blogrenanda.com/24960074/the-best-side-of-ald-film-properties